{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Co", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Co(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3021, "q": 14.53, "mu": 2.221, "epsilonL": 3.098e-06, "Eth": 28.53}, "E_min": 28.53, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
28.53	4.519e-38	
33.71	6.949e-05	
39.81	0.0004633	
47.03	0.001635	
55.56	0.004445	
65.62	0.01045	
77.52	0.02228	
91.57	0.04402	
108.2	0.0812	
127.8	0.1398	
150.9	0.2239	
178.3	0.3328	
210.6	0.4601	
248.8	0.5968	
293.8	0.7349	
347.1	0.8699	
410.0	1.001	
484.3	1.13	
572.1	1.258	
675.8	1.387	
798.3	1.519	
943.0	1.655	
1114.0	1.797	
1316.0	1.944	
1554.0	2.097	
1836.0	2.256	
2169.0	2.421	
2562.0	2.591	
3026.0	2.766	
3574.0	2.946	
4222.0	3.129	
4988.0	3.316	
5892.0	3.504	
6959.0	3.693	
8221.0	3.883	
9711.0	4.071	
11470.0	4.256	
13550.0	4.437	
16010.0	4.612	
18910.0	4.78	
22330.0	4.94	
26380.0	5.088	
31160.0	5.225	
36810.0	5.347	
43480.0	5.453	
51360.0	5.541	
60670.0	5.609	
71670.0	5.656	
84660.0	5.679	
-----