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Plasma-Surface Interaction Data Set 278

Sputtering of Co+ on Co(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Co+ on Co(pc) at 300 K

angle = 0.0 deg E /eV P
22.529.451e-41
26.735.069e-05
31.730.0003896
37.660.001511
44.70.004429
53.060.01109
62.980.02494
74.760.05142
88.730.09761
105.30.1699
125.00.27
148.40.3916
176.10.5233
209.10.6546
248.10.7803
294.50.8998
349.61.015
415.01.128
492.61.242
584.61.358
694.01.478
823.71.602
977.71.731
1160.01.864
1377.02.002
1635.02.145
1941.02.292
2303.02.442
2734.02.594
3245.02.749
3852.02.905
4572.03.062
5427.03.217
6442.03.371
7646.03.521
9076.03.667
10770.03.807
12790.03.94
15180.04.065
18010.04.179
21380.04.281
25380.04.369
30130.04.442
35760.04.499
42440.04.537
50380.04.555
59800.04.553
70980.04.528
84250.04.481

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 22.52 – 100000