{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Co", "surface_phase": "pc", "species": {"text": "Co+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Co+ on Co(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3615, "q": 11.65, "mu": 2.389, "epsilonL": 5.26e-06, "Eth": 22.52}, "E_min": 22.52, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
22.52	9.451e-41	
26.73	5.069e-05	
31.73	0.0003896	
37.66	0.001511	
44.7	0.004429	
53.06	0.01109	
62.98	0.02494	
74.76	0.05142	
88.73	0.09761	
105.3	0.1699	
125.0	0.27	
148.4	0.3916	
176.1	0.5233	
209.1	0.6546	
248.1	0.7803	
294.5	0.8998	
349.6	1.015	
415.0	1.128	
492.6	1.242	
584.6	1.358	
694.0	1.478	
823.7	1.602	
977.7	1.731	
1160.0	1.864	
1377.0	2.002	
1635.0	2.145	
1941.0	2.292	
2303.0	2.442	
2734.0	2.594	
3245.0	2.749	
3852.0	2.905	
4572.0	3.062	
5427.0	3.217	
6442.0	3.371	
7646.0	3.521	
9076.0	3.667	
10770.0	3.807	
12790.0	3.94	
15180.0	4.065	
18010.0	4.179	
21380.0	4.281	
25380.0	4.369	
30130.0	4.442	
35760.0	4.499	
42440.0	4.537	
50380.0	4.555	
59800.0	4.553	
70980.0	4.528	
84250.0	4.481	
-----