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Plasma-Surface Interaction Data Set 277

Sputtering of Ar+ on Co(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar+ on Co(pc) at 300 K

angle = 0.0 deg E /eV P
23.860.0
28.280.0001067
33.530.00078
39.760.002921
47.130.008295
55.880.02009
66.250.04346
78.540.08526
93.120.1521
110.40.2459
130.90.361
155.20.486
184.00.6099
218.10.7268
258.60.8359
306.60.9388
363.41.038
430.91.136
510.81.234
605.61.333
718.01.435
851.31.538
1009.01.644
1197.01.752
1419.01.862
1682.01.973
1994.02.085
2364.02.197
2803.02.309
3323.02.419
3939.02.527
4670.02.632
5537.02.733
6564.02.829
7782.02.919
9226.03.002
10940.03.076
12970.03.141
15370.03.195
18230.03.238
21610.03.268
25620.03.283
30380.03.284
36010.03.27
42690.03.239
50620.03.192
60010.03.129
71150.03.051
84350.02.957

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 23.86 – 100000