{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Co", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Co(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2709, "q": 8.402, "mu": 2.329, "epsilonL": 1.002e-05, "Eth": 23.86}, "E_min": 23.86, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
23.86	0.0	
28.28	0.0001067	
33.53	0.00078	
39.76	0.002921	
47.13	0.008295	
55.88	0.02009	
66.25	0.04346	
78.54	0.08526	
93.12	0.1521	
110.4	0.2459	
130.9	0.361	
155.2	0.486	
184.0	0.6099	
218.1	0.7268	
258.6	0.8359	
306.6	0.9388	
363.4	1.038	
430.9	1.136	
510.8	1.234	
605.6	1.333	
718.0	1.435	
851.3	1.538	
1009.0	1.644	
1197.0	1.752	
1419.0	1.862	
1682.0	1.973	
1994.0	2.085	
2364.0	2.197	
2803.0	2.309	
3323.0	2.419	
3939.0	2.527	
4670.0	2.632	
5537.0	2.733	
6564.0	2.829	
7782.0	2.919	
9226.0	3.002	
10940.0	3.076	
12970.0	3.141	
15370.0	3.195	
18230.0	3.238	
21610.0	3.268	
25620.0	3.283	
30380.0	3.284	
36010.0	3.27	
42690.0	3.239	
50620.0	3.192	
60010.0	3.129	
71150.0	3.051	
84350.0	2.957	
-----