pwiDB

Plasma-Surface Interaction Data Set 276

Sputtering of Ne⁺ on Co(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Co(pc) at 300 K

angle = 0.0 deg	E /eV	P
	20.81	0.0
	24.74	0.0005018
	29.42	0.003561
	34.97	0.01289
	41.58	0.03459
	49.43	0.07616
	58.77	0.1422
	69.87	0.2292
	83.06	0.3256
	98.75	0.4198
	117.4	0.5061
	139.6	0.5839
	165.9	0.6554
	197.3	0.7232
	234.5	0.7892
	278.8	0.8547
	331.5	0.9206
	394.1	0.9874
	468.6	1.055
	557.1	1.124
	662.3	1.193
	787.4	1.263
	936.1	1.333
	1113.0	1.403
	1323.0	1.472
	1573.0	1.54
	1870.0	1.606
	2223.0	1.669
	2643.0	1.73
	3142.0	1.786
	3736.0	1.838
	4442.0	1.885
	5281.0	1.927
	6278.0	1.961
	7464.0	1.988
	8873.0	2.007
	10550.0	2.017
	12540.0	2.017
	14910.0	2.008
	17730.0	1.988
	21080.0	1.959
	25060.0	1.919
	29790.0	1.869
	35410.0	1.81
	42100.0	1.742
	50060.0	1.667
	59510.0	1.585
	70750.0	1.499
	84110.0	1.409

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0828
q = 5.16
mu = 2.294
epsilonL = 2.43e-05
Eth = 20.81

Fit range

E = 20.81 – 100000