{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Co", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Co(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0828, "q": 5.16, "mu": 2.294, "epsilonL": 2.43e-05, "Eth": 20.81}, "E_min": 20.81, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
20.81	0.0	
24.74	0.0005018	
29.42	0.003561	
34.97	0.01289	
41.58	0.03459	
49.43	0.07616	
58.77	0.1422	
69.87	0.2292	
83.06	0.3256	
98.75	0.4198	
117.4	0.5061	
139.6	0.5839	
165.9	0.6554	
197.3	0.7232	
234.5	0.7892	
278.8	0.8547	
331.5	0.9206	
394.1	0.9874	
468.6	1.055	
557.1	1.124	
662.3	1.193	
787.4	1.263	
936.1	1.333	
1113.0	1.403	
1323.0	1.472	
1573.0	1.54	
1870.0	1.606	
2223.0	1.669	
2643.0	1.73	
3142.0	1.786	
3736.0	1.838	
4442.0	1.885	
5281.0	1.927	
6278.0	1.961	
7464.0	1.988	
8873.0	2.007	
10550.0	2.017	
12540.0	2.017	
14910.0	2.008	
17730.0	1.988	
21080.0	1.959	
25060.0	1.919	
29790.0	1.869	
35410.0	1.81	
42100.0	1.742	
50060.0	1.667	
59510.0	1.585	
70750.0	1.499	
84110.0	1.409	
-----