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Plasma-Surface Interaction Data Set 275

Sputtering of 4He+ on Co(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Co(pc) at 300 K

angle = 0.0 deg E /eV P
25.991.65e-31
30.760.0003249
36.40.001565
43.080.004374
50.980.009553
60.340.01773
71.410.02889
84.520.0421
100.00.05585
118.40.0688
140.10.08022
165.80.08998
196.20.09826
232.20.1053
274.90.1115
325.30.117
385.00.1218
455.60.1261
539.20.13
638.20.1334
755.30.1363
893.90.1387
1058.00.1406
1252.00.1419
1482.00.1426
1754.00.1426
2076.00.142
2456.00.1407
2907.00.1387
3441.00.136
4072.00.1327
4819.00.1287
5703.00.1242
6750.00.1191
7989.00.1136
9455.00.1077
11190.00.1016
13240.00.09528
15670.00.08891
18550.00.08255
21950.00.07628
25980.00.07016
30750.00.06425
36390.00.0586
43070.00.05324
50970.00.04819
60320.00.04348
71390.00.0391
84500.00.03506

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 25.99 – 100000