{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Co", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (4He)+ on Co(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1652, "q": 0.3649, "mu": 1.825, "epsilonL": 0.0001734, "Eth": 25.99}, "E_min": 25.99, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
25.99	1.65e-31	
30.76	0.0003249	
36.4	0.001565	
43.08	0.004374	
50.98	0.009553	
60.34	0.01773	
71.41	0.02889	
84.52	0.0421	
100.0	0.05585	
118.4	0.0688	
140.1	0.08022	
165.8	0.08998	
196.2	0.09826	
232.2	0.1053	
274.9	0.1115	
325.3	0.117	
385.0	0.1218	
455.6	0.1261	
539.2	0.13	
638.2	0.1334	
755.3	0.1363	
893.9	0.1387	
1058.0	0.1406	
1252.0	0.1419	
1482.0	0.1426	
1754.0	0.1426	
2076.0	0.142	
2456.0	0.1407	
2907.0	0.1387	
3441.0	0.136	
4072.0	0.1327	
4819.0	0.1287	
5703.0	0.1242	
6750.0	0.1191	
7989.0	0.1136	
9455.0	0.1077	
11190.0	0.1016	
13240.0	0.09528	
15670.0	0.08891	
18550.0	0.08255	
21950.0	0.07628	
25980.0	0.07016	
30750.0	0.06425	
36390.0	0.0586	
43070.0	0.05324	
50970.0	0.04819	
60320.0	0.04348	
71390.0	0.0391	
84500.0	0.03506	
-----