Return to search

Plasma-Surface Interaction Data Set 271

Sputtering of H+ on Co(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Co(pc) at 300 K

angle = 0.0 deg E /eV P
77.350.0
89.536.752e-05
103.60.0002982
119.90.0007775
138.80.001602
160.70.002835
186.00.004458
215.30.006338
249.20.008264
288.40.01004
333.80.01154
386.40.01272
447.20.01361
517.60.01426
599.10.01471
693.40.015
802.60.01516
928.90.01522
1075.00.01519
1244.00.01507
1440.00.01489
1667.00.01463
1930.00.01432
2234.00.01395
2585.00.01353
2992.00.01306
3463.00.01256
4009.00.01202
4640.00.01146
5370.00.01088
6216.00.01028
7194.00.009683
8327.00.009083
9638.00.00849
11160.00.007907
12910.00.00734
14940.00.006792
17300.00.006265
20020.00.005763
23170.00.005286
26820.00.004837
31050.00.004415
35930.00.00402
41590.00.003653
48140.00.003313
55720.00.002999
64490.00.002709
74640.00.002444
86400.00.002201

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 77.35 – 100000