{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Co", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of H+ on Co(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4456, "q": 0.0396, "mu": 1.771, "epsilonL": 0.0003746, "Eth": 77.35}, "E_min": 77.35, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
77.35	0.0	
89.53	6.752e-05	
103.6	0.0002982	
119.9	0.0007775	
138.8	0.001602	
160.7	0.002835	
186.0	0.004458	
215.3	0.006338	
249.2	0.008264	
288.4	0.01004	
333.8	0.01154	
386.4	0.01272	
447.2	0.01361	
517.6	0.01426	
599.1	0.01471	
693.4	0.015	
802.6	0.01516	
928.9	0.01522	
1075.0	0.01519	
1244.0	0.01507	
1440.0	0.01489	
1667.0	0.01463	
1930.0	0.01432	
2234.0	0.01395	
2585.0	0.01353	
2992.0	0.01306	
3463.0	0.01256	
4009.0	0.01202	
4640.0	0.01146	
5370.0	0.01088	
6216.0	0.01028	
7194.0	0.009683	
8327.0	0.009083	
9638.0	0.00849	
11160.0	0.007907	
12910.0	0.00734	
14940.0	0.006792	
17300.0	0.006265	
20020.0	0.005763	
23170.0	0.005286	
26820.0	0.004837	
31050.0	0.004415	
35930.0	0.00402	
41590.0	0.003653	
48140.0	0.003313	
55720.0	0.002999	
64490.0	0.002709	
74640.0	0.002444	
86400.0	0.002201	
-----