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Plasma-Surface Interaction Data Set 270

Sputtering of Xe+ on Fe(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe+ on Fe(pc) at 300 K

angle = 0.0 deg E /eV P
32.210.0
37.956.43e-05
44.720.0004076
52.70.001391
62.090.003681
73.170.008464
86.220.01772
101.60.03454
119.70.06323
141.10.1089
166.20.1761
195.80.2664
230.80.3774
271.90.5028
320.40.6354
377.50.7697
444.90.9032
524.21.036
617.71.169
727.81.304
857.61.442
1011.01.587
1191.01.737
1403.01.895
1653.02.062
1948.02.237
2296.02.42
2705.02.613
3187.02.815
3756.03.025
4425.03.243
5215.03.47
6145.03.703
7240.03.943
8531.04.189
10050.04.439
11850.04.692
13960.04.947
16450.05.202
19380.05.456
22840.05.708
26910.05.955
31710.06.195
37360.06.427
44020.06.649
51870.06.857
61120.07.05
72020.07.226
84870.07.382

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 32.21 – 100000