{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Fe", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Xe+ on Fe(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2492, "q": 19.89, "mu": 2.163, "epsilonL": 1.44e-06, "Eth": 32.21}, "E_min": 32.21, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
32.21	0.0	
37.95	6.43e-05	
44.72	0.0004076	
52.7	0.001391	
62.09	0.003681	
73.17	0.008464	
86.22	0.01772	
101.6	0.03454	
119.7	0.06323	
141.1	0.1089	
166.2	0.1761	
195.8	0.2664	
230.8	0.3774	
271.9	0.5028	
320.4	0.6354	
377.5	0.7697	
444.9	0.9032	
524.2	1.036	
617.7	1.169	
727.8	1.304	
857.6	1.442	
1011.0	1.587	
1191.0	1.737	
1403.0	1.895	
1653.0	2.062	
1948.0	2.237	
2296.0	2.42	
2705.0	2.613	
3187.0	2.815	
3756.0	3.025	
4425.0	3.243	
5215.0	3.47	
6145.0	3.703	
7240.0	3.943	
8531.0	4.189	
10050.0	4.439	
11850.0	4.692	
13960.0	4.947	
16450.0	5.202	
19380.0	5.456	
22840.0	5.708	
26910.0	5.955	
31710.0	6.195	
37360.0	6.427	
44020.0	6.649	
51870.0	6.857	
61120.0	7.05	
72020.0	7.226	
84870.0	7.382	
-----