pwiDB

Plasma-Surface Interaction Data Set 269

Sputtering of Kr⁺ on Fe(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Fe(pc) at 300 K

angle = 0.0 deg	E /eV	P
	27.86	1.556e-38
	32.92	5.768e-05
	38.91	0.0003927
	45.98	0.001405
	54.34	0.003865
	64.23	0.009178
	75.9	0.01976
	89.7	0.03942
	106.0	0.07344
	125.3	0.1277
	148.1	0.2065
	175.0	0.3095
	206.8	0.4309
	244.4	0.5617
	288.9	0.694
	341.4	0.8232
	403.4	0.9486
	476.8	1.071
	563.5	1.193
	665.9	1.316
	787.0	1.442
	930.1	1.572
	1099.0	1.706
	1299.0	1.847
	1535.0	1.992
	1814.0	2.144
	2144.0	2.301
	2534.0	2.463
	2995.0	2.63
	3540.0	2.801
	4183.0	2.976
	4944.0	3.154
	5843.0	3.333
	6905.0	3.514
	8161.0	3.694
	9644.0	3.873
	11400.0	4.05
	13470.0	4.222
	15920.0	4.389
	18810.0	4.549
	22230.0	4.7
	26280.0	4.842
	31060.0	4.971
	36700.0	5.087
	43380.0	5.187
	51260.0	5.27
	60580.0	5.334
	71600.0	5.377
	84620.0	5.398

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.3296
q = 13.81
mu = 2.246
epsilonL = 3.134e-06
Eth = 27.86

Fit range

E = 27.86 – 100000