{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Fe", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]} ------------------------------------------------------------------------ Sputtering of Kr+ on Fe(pc) at 300 K {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3296, "q": 13.81, "mu": 2.246, "epsilonL": 3.134e-06, "Eth": 27.86}, "E_min": 27.86, "E_max": 100000} angle = 0.0 deg E /eV P 27.86 1.556e-38 32.92 5.768e-05 38.91 0.0003927 45.98 0.001405 54.34 0.003865 64.23 0.009178 75.9 0.01976 89.7 0.03942 106.0 0.07344 125.3 0.1277 148.1 0.2065 175.0 0.3095 206.8 0.4309 244.4 0.5617 288.9 0.694 341.4 0.8232 403.4 0.9486 476.8 1.071 563.5 1.193 665.9 1.316 787.0 1.442 930.1 1.572 1099.0 1.706 1299.0 1.847 1535.0 1.992 1814.0 2.144 2144.0 2.301 2534.0 2.463 2995.0 2.63 3540.0 2.801 4183.0 2.976 4944.0 3.154 5843.0 3.333 6905.0 3.514 8161.0 3.694 9644.0 3.873 11400.0 4.05 13470.0 4.222 15920.0 4.389 18810.0 4.549 22230.0 4.7 26280.0 4.842 31060.0 4.971 36700.0 5.087 43380.0 5.187 51260.0 5.27 60580.0 5.334 71600.0 5.377 84620.0 5.398 -----