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Plasma-Surface Interaction Data Set 267

Sputtering of Ar+ on Fe(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar+ on Fe(pc) at 300 K

angle = 0.0 deg E /eV P
22.570.0
26.796.678e-05
31.80.0005103
37.740.00197
44.80.005743
53.170.01427
63.110.03168
74.90.06403
88.90.118
105.50.1974
125.20.2991
148.60.4133
176.40.5288
209.40.6384
248.50.7401
295.00.8354
350.10.9267
415.61.016
493.31.105
585.51.196
694.91.287
824.81.381
978.91.477
1162.01.575
1379.01.675
1637.01.776
1943.01.877
2306.01.979
2737.02.08
3248.02.18
3855.02.278
4576.02.373
5431.02.465
6447.02.551
7651.02.633
9082.02.708
10780.02.775
12790.02.833
15180.02.882
18020.02.92
21390.02.946
25390.02.959
30140.02.959
35770.02.944
42450.02.915
50390.02.871
59810.02.812
70980.02.739
84250.02.653

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 22.57 – 100000