{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Fe", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Fe(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3517, "q": 7.571, "mu": 2.382, "epsilonL": 1.025e-05, "Eth": 22.57}, "E_min": 22.57, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
22.57	0.0	
26.79	6.678e-05	
31.8	0.0005103	
37.74	0.00197	
44.8	0.005743	
53.17	0.01427	
63.11	0.03168	
74.9	0.06403	
88.9	0.118	
105.5	0.1974	
125.2	0.2991	
148.6	0.4133	
176.4	0.5288	
209.4	0.6384	
248.5	0.7401	
295.0	0.8354	
350.1	0.9267	
415.6	1.016	
493.3	1.105	
585.5	1.196	
694.9	1.287	
824.8	1.381	
978.9	1.477	
1162.0	1.575	
1379.0	1.675	
1637.0	1.776	
1943.0	1.877	
2306.0	1.979	
2737.0	2.08	
3248.0	2.18	
3855.0	2.278	
4576.0	2.373	
5431.0	2.465	
6447.0	2.551	
7651.0	2.633	
9082.0	2.708	
10780.0	2.775	
12790.0	2.833	
15180.0	2.882	
18020.0	2.92	
21390.0	2.946	
25390.0	2.959	
30140.0	2.959	
35770.0	2.944	
42450.0	2.915	
50390.0	2.871	
59810.0	2.812	
70980.0	2.739	
84250.0	2.653	
-----