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Plasma-Surface Interaction Data Set 263

Sputtering of 3He+ on Fe(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Fe(pc) at 300 K

angle = 0.0 deg E /eV P
29.653.856e-28
35.00.0002702
41.310.001086
48.760.00273
57.550.005587
67.930.01006
80.180.01641
94.640.0246
111.70.03414
131.80.04428
155.60.05421
183.70.06334
216.80.07138
255.90.07829
302.00.08417
356.50.08918
420.80.09344
496.70.09707
586.20.1002
691.90.1027
816.70.1049
963.90.1065
1138.00.1077
1343.00.1084
1585.00.1086
1871.00.1083
2208.00.1075
2606.00.1061
3076.00.1043
3631.00.1019
4286.00.09911
5059.00.09584
5971.00.09216
7047.00.08815
8318.00.08385
9818.00.07932
11590.00.07465
13680.00.06989
16140.00.06511
19060.00.06037
22490.00.05573
26550.00.05121
31330.00.04687
36980.00.04273
43650.00.03882
51520.00.03514
60810.00.03172
71780.00.02854
84720.00.0256

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 29.65 – 100000