{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Fe", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Fe(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.263, "q": 0.278, "mu": 1.595, "epsilonL": 0.0001844, "Eth": 29.65}, "E_min": 29.65, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
29.65	3.856e-28	
35.0	0.0002702	
41.31	0.001086	
48.76	0.00273	
57.55	0.005587	
67.93	0.01006	
80.18	0.01641	
94.64	0.0246	
111.7	0.03414	
131.8	0.04428	
155.6	0.05421	
183.7	0.06334	
216.8	0.07138	
255.9	0.07829	
302.0	0.08417	
356.5	0.08918	
420.8	0.09344	
496.7	0.09707	
586.2	0.1002	
691.9	0.1027	
816.7	0.1049	
963.9	0.1065	
1138.0	0.1077	
1343.0	0.1084	
1585.0	0.1086	
1871.0	0.1083	
2208.0	0.1075	
2606.0	0.1061	
3076.0	0.1043	
3631.0	0.1019	
4286.0	0.09911	
5059.0	0.09584	
5971.0	0.09216	
7047.0	0.08815	
8318.0	0.08385	
9818.0	0.07932	
11590.0	0.07465	
13680.0	0.06989	
16140.0	0.06511	
19060.0	0.06037	
22490.0	0.05573	
26550.0	0.05121	
31330.0	0.04687	
36980.0	0.04273	
43650.0	0.03882	
51520.0	0.03514	
60810.0	0.03172	
71780.0	0.02854	
84720.0	0.0256	
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