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Plasma-Surface Interaction Data Set 261

Sputtering of D+ on Fe(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Fe(pc) at 300 K

angle = 0.0 deg E /eV P
40.852.469e-24
47.910.0003468
56.180.001118
65.870.002402
77.250.004298
90.580.006846
106.20.009979
124.60.01351
146.10.01718
171.30.02073
200.80.02395
235.50.02674
276.10.02907
323.80.03096
379.70.03245
445.30.03359
522.10.03444
612.30.03502
717.90.03535
841.90.03548
987.20.03539
1158.00.03512
1357.00.03466
1592.00.03403
1867.00.03324
2189.00.0323
2567.00.03122
3010.00.03002
3529.00.02872
4138.00.02734
4853.00.0259
5690.00.02441
6673.00.02289
7825.00.02138
9175.00.01987
10760.00.0184
12620.00.01697
14790.00.01559
17350.00.01427
20340.00.01301
23850.00.01183
27970.00.01073
32800.00.009701
38460.00.008748
45100.00.007869
52890.00.007062
62020.00.006324
72720.00.005652
85280.00.005042

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 40.85 – 100000