{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Fe", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Fe(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2743, "q": 0.0919, "mu": 1.349, "epsilonL": 0.0003863, "Eth": 40.85}, "E_min": 40.85, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
40.85	2.469e-24	
47.91	0.0003468	
56.18	0.001118	
65.87	0.002402	
77.25	0.004298	
90.58	0.006846	
106.2	0.009979	
124.6	0.01351	
146.1	0.01718	
171.3	0.02073	
200.8	0.02395	
235.5	0.02674	
276.1	0.02907	
323.8	0.03096	
379.7	0.03245	
445.3	0.03359	
522.1	0.03444	
612.3	0.03502	
717.9	0.03535	
841.9	0.03548	
987.2	0.03539	
1158.0	0.03512	
1357.0	0.03466	
1592.0	0.03403	
1867.0	0.03324	
2189.0	0.0323	
2567.0	0.03122	
3010.0	0.03002	
3529.0	0.02872	
4138.0	0.02734	
4853.0	0.0259	
5690.0	0.02441	
6673.0	0.02289	
7825.0	0.02138	
9175.0	0.01987	
10760.0	0.0184	
12620.0	0.01697	
14790.0	0.01559	
17350.0	0.01427	
20340.0	0.01301	
23850.0	0.01183	
27970.0	0.01073	
32800.0	0.009701	
38460.0	0.008748	
45100.0	0.007869	
52890.0	0.007062	
62020.0	0.006324	
72720.0	0.005652	
85280.0	0.005042	
-----