pwiDB

Plasma-Surface Interaction Data Set 258

Sputtering of Kr⁺ on Mn(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Mn(pc) at 300 K

angle = 0.0 deg	E /eV	P
	21.1	0.0
	25.07	0.0004905
	29.8	0.002447
	35.42	0.007187
	42.1	0.01694
	50.04	0.03516
	59.47	0.06678
	70.69	0.1179
	84.01	0.195
	99.85	0.3021
	118.7	0.4396
	141.1	0.6028
	167.7	0.7838
	199.3	0.9746
	236.8	1.169
	281.5	1.366
	334.6	1.563
	397.6	1.764
	472.6	1.968
	561.7	2.179
	667.6	2.398
	793.5	2.625
	943.1	2.864
	1121.0	3.113
	1332.0	3.373
	1584.0	3.645
	1882.0	3.927
	2237.0	4.22
	2659.0	4.522
	3160.0	4.834
	3756.0	5.152
	4464.0	5.477
	5306.0	5.806
	6306.0	6.137
	7495.0	6.469
	8908.0	6.799
	10590.0	7.124
	12580.0	7.443
	14960.0	7.752
	17780.0	8.048
	21130.0	8.328
	25110.0	8.589
	29850.0	8.828
	35470.0	9.041
	42160.0	9.224
	50110.0	9.375
	59560.0	9.489
	70790.0	9.563
	84140.0	9.595

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1164
q = 24.54
mu = 1.838
epsilonL = 3.246e-06
Eth = 21.1

Fit range

E = 21.1 – 100000