{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mn", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Mn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1164, "q": 24.54, "mu": 1.838, "epsilonL": 3.246e-06, "Eth": 21.1}, "E_min": 21.1, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
21.1	0.0	
25.07	0.0004905	
29.8	0.002447	
35.42	0.007187	
42.1	0.01694	
50.04	0.03516	
59.47	0.06678	
70.69	0.1179	
84.01	0.195	
99.85	0.3021	
118.7	0.4396	
141.1	0.6028	
167.7	0.7838	
199.3	0.9746	
236.8	1.169	
281.5	1.366	
334.6	1.563	
397.6	1.764	
472.6	1.968	
561.7	2.179	
667.6	2.398	
793.5	2.625	
943.1	2.864	
1121.0	3.113	
1332.0	3.373	
1584.0	3.645	
1882.0	3.927	
2237.0	4.22	
2659.0	4.522	
3160.0	4.834	
3756.0	5.152	
4464.0	5.477	
5306.0	5.806	
6306.0	6.137	
7495.0	6.469	
8908.0	6.799	
10590.0	7.124	
12580.0	7.443	
14960.0	7.752	
17780.0	8.048	
21130.0	8.328	
25110.0	8.589	
29850.0	8.828	
35470.0	9.041	
42160.0	9.224	
50110.0	9.375	
59560.0	9.489	
70790.0	9.563	
84140.0	9.595	
-----