pwiDB

Plasma-Surface Interaction Data Set 257

Sputtering of Ar⁺ on Mn(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Mn(pc) at 300 K

angle = 0.0 deg	E /eV	P
	18.0	0.0
	21.46	0.0006216
	25.59	0.003423
	30.51	0.0107
	36.38	0.02636
	43.38	0.05631
	51.73	0.1083
	61.68	0.19
	73.55	0.3057
	87.7	0.4528
	104.6	0.6217
	124.7	0.8003
	148.7	0.9789
	177.3	1.153
	211.4	1.321
	252.1	1.486
	300.6	1.649
	358.4	1.813
	427.4	1.979
	509.6	2.148
	607.7	2.322
	724.6	2.5
	864.0	2.683
	1030.0	2.87
	1229.0	3.061
	1465.0	3.255
	1747.0	3.45
	2083.0	3.646
	2484.0	3.842
	2961.0	4.036
	3531.0	4.226
	4211.0	4.411
	5021.0	4.59
	5987.0	4.759
	7139.0	4.918
	8512.0	5.065
	10150.0	5.196
	12100.0	5.311
	14430.0	5.406
	17210.0	5.481
	20520.0	5.532
	24470.0	5.557
	29180.0	5.556
	34790.0	5.526
	41480.0	5.468
	49470.0	5.38
	58980.0	5.263
	70330.0	5.117
	83860.0	4.946

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1275
q = 14.22
mu = 1.957
epsilonL = 1.066e-05
Eth = 18

Fit range

E = 18 – 100000