{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mn", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Mn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1275, "q": 14.22, "mu": 1.957, "epsilonL": 1.066e-05, "Eth": 18}, "E_min": 18, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
18.0	0.0	
21.46	0.0006216	
25.59	0.003423	
30.51	0.0107	
36.38	0.02636	
43.38	0.05631	
51.73	0.1083	
61.68	0.19	
73.55	0.3057	
87.7	0.4528	
104.6	0.6217	
124.7	0.8003	
148.7	0.9789	
177.3	1.153	
211.4	1.321	
252.1	1.486	
300.6	1.649	
358.4	1.813	
427.4	1.979	
509.6	2.148	
607.7	2.322	
724.6	2.5	
864.0	2.683	
1030.0	2.87	
1229.0	3.061	
1465.0	3.255	
1747.0	3.45	
2083.0	3.646	
2484.0	3.842	
2961.0	4.036	
3531.0	4.226	
4211.0	4.411	
5021.0	4.59	
5987.0	4.759	
7139.0	4.918	
8512.0	5.065	
10150.0	5.196	
12100.0	5.311	
14430.0	5.406	
17210.0	5.481	
20520.0	5.532	
24470.0	5.557	
29180.0	5.556	
34790.0	5.526	
41480.0	5.468	
49470.0	5.38	
58980.0	5.263	
70330.0	5.117	
83860.0	4.946	
-----