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Plasma-Surface Interaction Data Set 256

Sputtering of ⁴He⁺ on Mn(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of ⁴He⁺ on Mn(pc) at 300 K

angle = 0.0 deg	E /eV	P
	16.48	0.0
	19.69	0.0003671
	23.52	0.001828
	28.1	0.005292
	33.56	0.01204
	40.09	0.02344
	47.89	0.04019
	57.21	0.06159
	68.34	0.08547
	81.63	0.1092
	97.51	0.1309
	116.5	0.1498
	139.1	0.1661
	166.2	0.1802
	198.6	0.1925
	237.2	0.2035
	283.3	0.2134
	338.4	0.2224
	404.3	0.2305
	482.9	0.2378
	576.9	0.2442
	689.1	0.2497
	823.2	0.2543
	983.3	0.2578
	1175.0	0.2601
	1403.0	0.2611
	1676.0	0.2609
	2002.0	0.2593
	2392.0	0.2563
	2857.0	0.2519
	3413.0	0.2461
	4077.0	0.2389
	4870.0	0.2306
	5818.0	0.2211
	6949.0	0.2107
	8301.0	0.1995
	9916.0	0.1877
	11850.0	0.1756
	14150.0	0.1633
	16900.0	0.151
	20190.0	0.1389
	24120.0	0.1271
	28810.0	0.1158
	34420.0	0.105
	41110.0	0.09479
	49110.0	0.08524
	58670.0	0.07637
	70080.0	0.06818
	83710.0	0.06068

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2061
q = 0.668
mu = 1.836
epsilonL = 0.0001905
Eth = 16.48

Fit range

E = 16.48 – 100000