{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mn", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (4He)+ on Mn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2061, "q": 0.668, "mu": 1.836, "epsilonL": 0.0001905, "Eth": 16.48}, "E_min": 16.48, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
16.48	0.0	
19.69	0.0003671	
23.52	0.001828	
28.1	0.005292	
33.56	0.01204	
40.09	0.02344	
47.89	0.04019	
57.21	0.06159	
68.34	0.08547	
81.63	0.1092	
97.51	0.1309	
116.5	0.1498	
139.1	0.1661	
166.2	0.1802	
198.6	0.1925	
237.2	0.2035	
283.3	0.2134	
338.4	0.2224	
404.3	0.2305	
482.9	0.2378	
576.9	0.2442	
689.1	0.2497	
823.2	0.2543	
983.3	0.2578	
1175.0	0.2601	
1403.0	0.2611	
1676.0	0.2609	
2002.0	0.2593	
2392.0	0.2563	
2857.0	0.2519	
3413.0	0.2461	
4077.0	0.2389	
4870.0	0.2306	
5818.0	0.2211	
6949.0	0.2107	
8301.0	0.1995	
9916.0	0.1877	
11850.0	0.1756	
14150.0	0.1633	
16900.0	0.151	
20190.0	0.1389	
24120.0	0.1271	
28810.0	0.1158	
34420.0	0.105	
41110.0	0.09479	
49110.0	0.08524	
58670.0	0.07637	
70080.0	0.06818	
83710.0	0.06068	
-----