pwiDB

Plasma-Surface Interaction Data Set 255

Sputtering of ³He⁺ on Mn(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of ³He⁺ on Mn(pc) at 300 K

angle = 0.0 deg	E /eV	P
	19.77	0.0
	23.53	0.0004824
	28.0	0.002633
	33.32	0.007907
	39.66	0.01794
	47.2	0.03351
	56.17	0.05348
	66.85	0.075
	79.56	0.09529
	94.69	0.1129
	112.7	0.1277
	134.1	0.1402
	159.6	0.1509
	190.0	0.1603
	226.1	0.1688
	269.1	0.1766
	320.2	0.1838
	381.1	0.1903
	453.6	0.1963
	539.8	0.2016
	642.4	0.2063
	764.6	0.2102
	909.9	0.2132
	1083.0	0.2154
	1289.0	0.2167
	1534.0	0.2169
	1825.0	0.2161
	2173.0	0.2141
	2586.0	0.2111
	3077.0	0.2069
	3662.0	0.2016
	4359.0	0.1953
	5187.0	0.1881
	6173.0	0.18
	7347.0	0.1713
	8744.0	0.162
	10410.0	0.1523
	12380.0	0.1424
	14740.0	0.1323
	17540.0	0.1224
	20880.0	0.1126
	24850.0	0.1031
	29570.0	0.09398
	35190.0	0.0853
	41880.0	0.07711
	49850.0	0.06944
	59320.0	0.06232
	70600.0	0.05575
	84020.0	0.04972

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1201
q = 0.5548
mu = 1.976
epsilonL = 0.0001937
Eth = 19.77

Fit range

E = 19.77 – 100000