{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mn", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (3He)+ on Mn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1201, "q": 0.5548, "mu": 1.976, "epsilonL": 0.0001937, "Eth": 19.77}, "E_min": 19.77, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
19.77	0.0	
23.53	0.0004824	
28.0	0.002633	
33.32	0.007907	
39.66	0.01794	
47.2	0.03351	
56.17	0.05348	
66.85	0.075	
79.56	0.09529	
94.69	0.1129	
112.7	0.1277	
134.1	0.1402	
159.6	0.1509	
190.0	0.1603	
226.1	0.1688	
269.1	0.1766	
320.2	0.1838	
381.1	0.1903	
453.6	0.1963	
539.8	0.2016	
642.4	0.2063	
764.6	0.2102	
909.9	0.2132	
1083.0	0.2154	
1289.0	0.2167	
1534.0	0.2169	
1825.0	0.2161	
2173.0	0.2141	
2586.0	0.2111	
3077.0	0.2069	
3662.0	0.2016	
4359.0	0.1953	
5187.0	0.1881	
6173.0	0.18	
7347.0	0.1713	
8744.0	0.162	
10410.0	0.1523	
12380.0	0.1424	
14740.0	0.1323	
17540.0	0.1224	
20880.0	0.1126	
24850.0	0.1031	
29570.0	0.09398	
35190.0	0.0853	
41880.0	0.07711	
49850.0	0.06944	
59320.0	0.06232	
70600.0	0.05575	
84020.0	0.04972	
-----