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Plasma-Surface Interaction Data Set 253

Sputtering of D+ on Mn(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Mn(pc) at 300 K

angle = 0.0 deg E /eV P
25.571.015e-30
30.270.0002362
35.840.001086
42.430.002955
50.230.006357
59.460.01172
70.40.01909
83.340.02791
98.670.03715
116.80.04581
138.30.05327
163.70.05938
193.80.06425
229.50.0681
271.70.07113
321.60.0735
380.80.07534
450.80.07671
533.70.07764
631.90.07817
748.10.07829
885.60.07801
1048.00.07733
1241.00.07626
1470.00.07479
1740.00.07296
2060.00.07077
2439.00.06825
2887.00.06546
3418.00.06242
4046.00.05918
4790.00.0558
5671.00.05234
6714.00.04883
7949.00.04532
9411.00.04187
11140.00.0385
13190.00.03524
15620.00.03213
18490.00.02918
21890.00.02641
25910.00.02382
30680.00.02141
36320.00.01919
43000.00.01716
50900.00.0153
60260.00.0136
71350.00.01207
84470.00.01069

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 25.57 – 100000