{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mn", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Mn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3203, "q": 0.2007, "mu": 1.763, "epsilonL": 0.0004063, "Eth": 25.57}, "E_min": 25.57, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
25.57	1.015e-30	
30.27	0.0002362	
35.84	0.001086	
42.43	0.002955	
50.23	0.006357	
59.46	0.01172	
70.4	0.01909	
83.34	0.02791	
98.67	0.03715	
116.8	0.04581	
138.3	0.05327	
163.7	0.05938	
193.8	0.06425	
229.5	0.0681	
271.7	0.07113	
321.6	0.0735	
380.8	0.07534	
450.8	0.07671	
533.7	0.07764	
631.9	0.07817	
748.1	0.07829	
885.6	0.07801	
1048.0	0.07733	
1241.0	0.07626	
1470.0	0.07479	
1740.0	0.07296	
2060.0	0.07077	
2439.0	0.06825	
2887.0	0.06546	
3418.0	0.06242	
4046.0	0.05918	
4790.0	0.0558	
5671.0	0.05234	
6714.0	0.04883	
7949.0	0.04532	
9411.0	0.04187	
11140.0	0.0385	
13190.0	0.03524	
15620.0	0.03213	
18490.0	0.02918	
21890.0	0.02641	
25910.0	0.02382	
30680.0	0.02141	
36320.0	0.01919	
43000.0	0.01716	
50900.0	0.0153	
60260.0	0.0136	
71350.0	0.01207	
84470.0	0.01069	
-----