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Plasma-Surface Interaction Data Set 252

Sputtering of H+ on Mn(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Mn(pc) at 300 K

angle = 0.0 deg E /eV P
43.50.0
50.941.922e-05
59.660.000161
69.870.000641
81.830.001837
95.830.00423
112.20.008058
131.40.01286
153.90.0176
180.30.02148
211.10.02431
247.20.02628
289.60.02764
339.10.02859
397.10.02927
465.10.02974
544.70.03004
637.90.0302
747.00.03022
874.90.0301
1025.00.02985
1200.00.02947
1405.00.02895
1646.00.02831
1927.00.02755
2257.00.02668
2643.00.02571
3096.00.02465
3625.00.02351
4246.00.02232
4972.00.02109
5823.00.01983
6820.00.01856
7987.00.0173
9353.00.01606
10950.00.01484
12830.00.01367
15020.00.01254
17590.00.01146
20610.00.01045
24130.00.009495
28260.00.008603
33100.00.007774
38760.00.007008
45390.00.006302
53160.00.005655
62260.00.005064
72910.00.004526
85390.00.004038

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 43.5 – 100000