{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mn", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of H+ on Mn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.5704, "q": 0.0774, "mu": 2.55, "epsilonL": 0.0004135, "Eth": 43.5}, "E_min": 43.5, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
43.5	0.0	
50.94	1.922e-05	
59.66	0.000161	
69.87	0.000641	
81.83	0.001837	
95.83	0.00423	
112.2	0.008058	
131.4	0.01286	
153.9	0.0176	
180.3	0.02148	
211.1	0.02431	
247.2	0.02628	
289.6	0.02764	
339.1	0.02859	
397.1	0.02927	
465.1	0.02974	
544.7	0.03004	
637.9	0.0302	
747.0	0.03022	
874.9	0.0301	
1025.0	0.02985	
1200.0	0.02947	
1405.0	0.02895	
1646.0	0.02831	
1927.0	0.02755	
2257.0	0.02668	
2643.0	0.02571	
3096.0	0.02465	
3625.0	0.02351	
4246.0	0.02232	
4972.0	0.02109	
5823.0	0.01983	
6820.0	0.01856	
7987.0	0.0173	
9353.0	0.01606	
10950.0	0.01484	
12830.0	0.01367	
15020.0	0.01254	
17590.0	0.01146	
20610.0	0.01045	
24130.0	0.009495	
28260.0	0.008603	
33100.0	0.007774	
38760.0	0.007008	
45390.0	0.006302	
53160.0	0.005655	
62260.0	0.005064	
72910.0	0.004526	
85390.0	0.004038	
-----