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Plasma-Surface Interaction Data Set 249

Sputtering of Cr+ on Cr(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Cr+ on Cr(pc) at 300 K

angle = 0.0 deg E /eV P
21.440.0
25.478.28e-05
30.260.0005289
35.960.001825
42.720.004888
50.760.01136
60.310.024
71.660.04694
85.140.08554
101.20.1451
120.20.2282
142.80.3325
169.70.4505
201.60.5734
239.50.6948
284.60.8116
338.20.9239
401.81.033
477.41.141
567.21.249
674.01.359
800.81.472
951.41.587
1130.01.705
1343.01.827
1596.01.951
1896.02.077
2253.02.205
2677.02.335
3181.02.465
3779.02.595
4490.02.724
5335.02.851
6339.02.974
7531.03.093
8949.03.207
10630.03.314
12630.03.413
15010.03.502
17830.03.581
21190.03.648
25180.03.702
29910.03.74
35540.03.763
42230.03.768
50180.03.755
59620.03.724
70840.03.673
84160.03.604

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 21.44 – 100000