{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cr", "surface_phase": "pc", "species": {"text": "Cr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Cr+ on Cr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3472, "q": 9.636, "mu": 2.15, "epsilonL": 6.923e-06, "Eth": 21.44}, "E_min": 21.44, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
21.44	0.0	
25.47	8.28e-05	
30.26	0.0005289	
35.96	0.001825	
42.72	0.004888	
50.76	0.01136	
60.31	0.024	
71.66	0.04694	
85.14	0.08554	
101.2	0.1451	
120.2	0.2282	
142.8	0.3325	
169.7	0.4505	
201.6	0.5734	
239.5	0.6948	
284.6	0.8116	
338.2	0.9239	
401.8	1.033	
477.4	1.141	
567.2	1.249	
674.0	1.359	
800.8	1.472	
951.4	1.587	
1130.0	1.705	
1343.0	1.827	
1596.0	1.951	
1896.0	2.077	
2253.0	2.205	
2677.0	2.335	
3181.0	2.465	
3779.0	2.595	
4490.0	2.724	
5335.0	2.851	
6339.0	2.974	
7531.0	3.093	
8949.0	3.207	
10630.0	3.314	
12630.0	3.413	
15010.0	3.502	
17830.0	3.581	
21190.0	3.648	
25180.0	3.702	
29910.0	3.74	
35540.0	3.763	
42230.0	3.768	
50180.0	3.755	
59620.0	3.724	
70840.0	3.673	
84160.0	3.604	
-----