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Plasma-Surface Interaction Data Set 248

Sputtering of Ar+ on Cr(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar+ on Cr(pc) at 300 K

angle = 0.0 deg E /eV P
22.350.0
26.547.988e-05
31.50.0005976
37.40.002276
44.40.00656
52.710.01613
62.570.03545
74.280.07085
88.180.129
104.70.213
124.30.3191
147.50.4365
175.10.5543
207.90.6657
246.80.7692
293.00.8662
347.90.9593
413.01.051
490.21.142
582.01.234
690.91.328
820.21.423
973.71.521
1156.01.62
1372.01.721
1629.01.823
1934.01.926
2296.02.028
2725.02.13
3235.02.23
3841.02.328
4560.02.422
5413.02.513
6426.02.599
7629.02.679
9056.02.751
10750.02.816
12760.02.871
15150.02.917
17990.02.951
21350.02.972
25350.02.981
30090.02.975
35730.02.955
42410.02.92
50350.02.87
59770.02.806
70960.02.727
84240.02.635

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 22.35 – 100000