{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cr", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Cr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3285, "q": 7.622, "mu": 2.355, "epsilonL": 1.093e-05, "Eth": 22.35}, "E_min": 22.35, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
22.35	0.0	
26.54	7.988e-05	
31.5	0.0005976	
37.4	0.002276	
44.4	0.00656	
52.71	0.01613	
62.57	0.03545	
74.28	0.07085	
88.18	0.129	
104.7	0.213	
124.3	0.3191	
147.5	0.4365	
175.1	0.5543	
207.9	0.6657	
246.8	0.7692	
293.0	0.8662	
347.9	0.9593	
413.0	1.051	
490.2	1.142	
582.0	1.234	
690.9	1.328	
820.2	1.423	
973.7	1.521	
1156.0	1.62	
1372.0	1.721	
1629.0	1.823	
1934.0	1.926	
2296.0	2.028	
2725.0	2.13	
3235.0	2.23	
3841.0	2.328	
4560.0	2.422	
5413.0	2.513	
6426.0	2.599	
7629.0	2.679	
9056.0	2.751	
10750.0	2.816	
12760.0	2.871	
15150.0	2.917	
17990.0	2.951	
21350.0	2.972	
25350.0	2.981	
30090.0	2.975	
35730.0	2.955	
42410.0	2.92	
50350.0	2.87	
59770.0	2.806	
70960.0	2.727	
84240.0	2.635	
-----