pwiDB

Plasma-Surface Interaction Data Set 247

Sputtering of Ne⁺ on Cr(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Cr(pc) at 300 K

angle = 0.0 deg	E /eV	P
	18.55	0.0
	22.11	0.0002094
	26.34	0.001443
	31.39	0.005214
	37.41	0.01437
	44.58	0.03374
	53.12	0.0702
	63.3	0.1309
	75.44	0.2193
	89.9	0.3302
	107.1	0.4518
	127.7	0.5718
	152.1	0.6832
	181.3	0.7846
	216.0	0.8778
	257.4	0.9653
	306.8	1.05
	365.6	1.132
	435.7	1.214
	519.2	1.296
	618.7	1.378
	737.3	1.459
	878.6	1.541
	1047.0	1.622
	1248.0	1.701
	1487.0	1.779
	1772.0	1.855
	2111.0	1.927
	2516.0	1.996
	2998.0	2.059
	3573.0	2.118
	4258.0	2.169
	5074.0	2.214
	6046.0	2.25
	7205.0	2.277
	8586.0	2.295
	10230.0	2.301
	12190.0	2.297
	14530.0	2.28
	17320.0	2.252
	20630.0	2.212
	24590.0	2.159
	29300.0	2.096
	34920.0	2.022
	41610.0	1.939
	49590.0	1.847
	59090.0	1.75
	70420.0	1.647
	83920.0	1.542

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.255
q = 5.885
mu = 2.241
epsilonL = 2.713e-05
Eth = 18.55

Fit range

E = 18.55 – 100000