{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cr", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Cr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.255, "q": 5.885, "mu": 2.241, "epsilonL": 2.713e-05, "Eth": 18.55}, "E_min": 18.55, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
18.55	0.0	
22.11	0.0002094	
26.34	0.001443	
31.39	0.005214	
37.41	0.01437	
44.58	0.03374	
53.12	0.0702	
63.3	0.1309	
75.44	0.2193	
89.9	0.3302	
107.1	0.4518	
127.7	0.5718	
152.1	0.6832	
181.3	0.7846	
216.0	0.8778	
257.4	0.9653	
306.8	1.05	
365.6	1.132	
435.7	1.214	
519.2	1.296	
618.7	1.378	
737.3	1.459	
878.6	1.541	
1047.0	1.622	
1248.0	1.701	
1487.0	1.779	
1772.0	1.855	
2111.0	1.927	
2516.0	1.996	
2998.0	2.059	
3573.0	2.118	
4258.0	2.169	
5074.0	2.214	
6046.0	2.25	
7205.0	2.277	
8586.0	2.295	
10230.0	2.301	
12190.0	2.297	
14530.0	2.28	
17320.0	2.252	
20630.0	2.212	
24590.0	2.159	
29300.0	2.096	
34920.0	2.022	
41610.0	1.939	
49590.0	1.847	
59090.0	1.75	
70420.0	1.647	
83920.0	1.542	
-----