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Plasma-Surface Interaction Data Set 245

Sputtering of ³He⁺ on Cr(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of ³He⁺ on Cr(pc) at 300 K

angle = 0.0 deg	E /eV	P
	28.8	2.064e-23
	34.02	0.0007155
	40.17	0.002272
	47.45	0.004884
	56.04	0.008837
	66.18	0.01435
	78.16	0.02148
	92.31	0.03003
	109.0	0.03956
	128.7	0.04947
	152.1	0.05921
	179.6	0.06833
	212.1	0.07658
	250.5	0.08388
	295.8	0.09024
	349.4	0.09573
	412.6	0.1005
	487.3	0.1045
	575.5	0.1079
	679.7	0.1107
	802.7	0.1129
	948.0	0.1146
	1120.0	0.1157
	1322.0	0.1163
	1562.0	0.1163
	1844.0	0.1158
	2178.0	0.1146
	2573.0	0.1129
	3038.0	0.1107
	3588.0	0.1079
	4238.0	0.1046
	5005.0	0.1008
	5911.0	0.09669
	6981.0	0.09219
	8244.0	0.08742
	9737.0	0.08245
	11500.0	0.07736
	13580.0	0.07221
	16040.0	0.06708
	18940.0	0.06202
	22370.0	0.05708
	26420.0	0.05232
	31200.0	0.04776
	36850.0	0.04344
	43520.0	0.03937
	51400.0	0.03556
	60710.0	0.03202
	71690.0	0.02876
	84670.0	0.02575

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1869
q = 0.2985
mu = 1.306
epsilonL = 0.0002035
Eth = 28.8

Fit range

E = 28.8 – 100000