{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cr", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Cr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1869, "q": 0.2985, "mu": 1.306, "epsilonL": 0.0002035, "Eth": 28.8}, "E_min": 28.8, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
28.8	2.064e-23	
34.02	0.0007155	
40.17	0.002272	
47.45	0.004884	
56.04	0.008837	
66.18	0.01435	
78.16	0.02148	
92.31	0.03003	
109.0	0.03956	
128.7	0.04947	
152.1	0.05921	
179.6	0.06833	
212.1	0.07658	
250.5	0.08388	
295.8	0.09024	
349.4	0.09573	
412.6	0.1005	
487.3	0.1045	
575.5	0.1079	
679.7	0.1107	
802.7	0.1129	
948.0	0.1146	
1120.0	0.1157	
1322.0	0.1163	
1562.0	0.1163	
1844.0	0.1158	
2178.0	0.1146	
2573.0	0.1129	
3038.0	0.1107	
3588.0	0.1079	
4238.0	0.1046	
5005.0	0.1008	
5911.0	0.09669	
6981.0	0.09219	
8244.0	0.08742	
9737.0	0.08245	
11500.0	0.07736	
13580.0	0.07221	
16040.0	0.06708	
18940.0	0.06202	
22370.0	0.05708	
26420.0	0.05232	
31200.0	0.04776	
36850.0	0.04344	
43520.0	0.03937	
51400.0	0.03556	
60710.0	0.03202	
71690.0	0.02876	
84670.0	0.02575	
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