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Plasma-Surface Interaction Data Set 244

Sputtering of T+ on Cr(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Cr(pc) at 300 K

angle = 0.0 deg E /eV P
25.070.0
29.70.0002347
35.170.00112
41.660.003102
49.340.006706
58.430.01227
69.20.01962
81.960.02795
97.070.03618
115.00.0435
136.20.04957
161.30.05442
191.00.05825
226.20.06128
267.90.06368
317.30.06557
375.80.06704
445.10.06814
527.20.06887
624.40.06926
739.50.06931
875.80.069
1037.00.06835
1229.00.06734
1455.00.06599
1723.00.06432
2041.00.06233
2417.00.06007
2863.00.05755
3391.00.05483
4016.00.05194
4756.00.04893
5633.00.04584
6672.00.04273
7902.00.03962
9359.00.03657
11080.00.03359
13130.00.03073
15550.00.02799
18410.00.0254
21810.00.02297
25830.00.0207
30590.00.01859
36230.00.01665
42910.00.01487
50820.00.01325
60190.00.01178
71290.00.01044
84430.00.009242

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 25.07 – 100000