{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cr", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]} ------------------------------------------------------------------------ Sputtering of T+ on Cr(pc) at 300 K {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2663, "q": 0.1776, "mu": 1.813, "epsilonL": 0.0004197, "Eth": 25.07}, "E_min": 25.07, "E_max": 100000} angle = 0.0 deg E /eV P 25.07 0.0 29.7 0.0002347 35.17 0.00112 41.66 0.003102 49.34 0.006706 58.43 0.01227 69.2 0.01962 81.96 0.02795 97.07 0.03618 115.0 0.0435 136.2 0.04957 161.3 0.05442 191.0 0.05825 226.2 0.06128 267.9 0.06368 317.3 0.06557 375.8 0.06704 445.1 0.06814 527.2 0.06887 624.4 0.06926 739.5 0.06931 875.8 0.069 1037.0 0.06835 1229.0 0.06734 1455.0 0.06599 1723.0 0.06432 2041.0 0.06233 2417.0 0.06007 2863.0 0.05755 3391.0 0.05483 4016.0 0.05194 4756.0 0.04893 5633.0 0.04584 6672.0 0.04273 7902.0 0.03962 9359.0 0.03657 11080.0 0.03359 13130.0 0.03073 15550.0 0.02799 18410.0 0.0254 21810.0 0.02297 25830.0 0.0207 30590.0 0.01859 36230.0 0.01665 42910.0 0.01487 50820.0 0.01325 60190.0 0.01178 71290.0 0.01044 84430.0 0.009242 -----