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Plasma-Surface Interaction Data Set 243

Sputtering of D+ on Cr(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Cr(pc) at 300 K

angle = 0.0 deg E /eV P
35.024.826e-30
41.20.0002024
48.460.0008797
57.010.002284
67.060.004686
78.880.008231
92.790.01278
109.20.01786
128.40.0229
151.00.02742
177.70.03119
209.00.0342
245.80.03654
289.20.03834
340.20.03971
400.10.04073
470.70.04146
553.70.04192
651.30.04216
766.10.04217
901.20.04196
1060.00.04155
1247.00.04093
1467.00.04011
1726.00.03911
2030.00.03794
2388.00.0366
2809.00.03513
3304.00.03354
3886.00.03185
4572.00.03009
5378.00.02829
6326.00.02647
7441.00.02465
8753.00.02285
10300.00.02109
12110.00.01939
14250.00.01775
16760.00.0162
19710.00.01473
23190.00.01335
27280.00.01206
32090.00.01087
37750.00.009771
44400.00.00876
52230.00.007835
61440.00.006993
72270.00.006229
85010.00.005538

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 35.02 – 100000