{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cr", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Cr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2899, "q": 0.1084, "mu": 1.715, "epsilonL": 0.0004275, "Eth": 35.02}, "E_min": 35.02, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
35.02	4.826e-30	
41.2	0.0002024	
48.46	0.0008797	
57.01	0.002284	
67.06	0.004686	
78.88	0.008231	
92.79	0.01278	
109.2	0.01786	
128.4	0.0229	
151.0	0.02742	
177.7	0.03119	
209.0	0.0342	
245.8	0.03654	
289.2	0.03834	
340.2	0.03971	
400.1	0.04073	
470.7	0.04146	
553.7	0.04192	
651.3	0.04216	
766.1	0.04217	
901.2	0.04196	
1060.0	0.04155	
1247.0	0.04093	
1467.0	0.04011	
1726.0	0.03911	
2030.0	0.03794	
2388.0	0.0366	
2809.0	0.03513	
3304.0	0.03354	
3886.0	0.03185	
4572.0	0.03009	
5378.0	0.02829	
6326.0	0.02647	
7441.0	0.02465	
8753.0	0.02285	
10300.0	0.02109	
12110.0	0.01939	
14250.0	0.01775	
16760.0	0.0162	
19710.0	0.01473	
23190.0	0.01335	
27280.0	0.01206	
32090.0	0.01087	
37750.0	0.009771	
44400.0	0.00876	
52230.0	0.007835	
61440.0	0.006993	
72270.0	0.006229	
85010.0	0.005538	
-----