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Plasma-Surface Interaction Data Set 242

Sputtering of H+ on Cr(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Cr(pc) at 300 K

angle = 0.0 deg E /eV P
65.880.0
76.50.0001416
88.840.000505
103.20.001147
119.80.002123
139.10.003448
161.50.005066
187.60.006849
217.80.008636
253.00.01028
293.80.0117
341.10.01285
396.10.01375
460.00.01442
534.20.0149
620.30.01521
720.30.01539
836.50.01546
971.30.01542
1128.00.0153
1310.00.01509
1521.00.01481
1766.00.01447
2051.00.01406
2382.00.01361
2766.00.0131
3212.00.01256
3730.00.01198
4331.00.01138
5030.00.01077
5841.00.01014
6782.00.009517
7876.00.008894
9146.00.00828
10620.00.007682
12330.00.007102
14320.00.006545
16630.00.006014
19310.00.005509
22430.00.005033
26040.00.004587
30240.00.00417
35120.00.003782
40780.00.003423
47360.00.003092
54990.00.002787
63860.00.002509
74160.00.002254
86110.00.002022

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 65.88 – 100000