pwiDB

Plasma-Surface Interaction Data Set 241

Sputtering of Xe⁺ on V(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on V(pc) at 300 K

angle = 0.0 deg	E /eV	P
	41.64	0.0
	48.81	7.355e-05
	57.22	0.0004063
	67.07	0.001265
	78.61	0.003115
	92.15	0.006735
	108.0	0.01337
	126.6	0.02491
	148.4	0.04398
	174.0	0.07386
	203.9	0.1179
	239.0	0.1787
	280.2	0.2566
	328.4	0.3493
	384.9	0.4526
	451.2	0.5615
	528.9	0.6725
	619.9	0.7832
	726.7	0.8934
	851.8	1.003
	998.4	1.114
	1170.0	1.227
	1372.0	1.342
	1608.0	1.462
	1885.0	1.586
	2209.0	1.714
	2590.0	1.848
	3036.0	1.987
	3558.0	2.131
	4171.0	2.281
	4889.0	2.435
	5731.0	2.594
	6717.0	2.757
	7874.0	2.923
	9229.0	3.092
	10820.0	3.264
	12680.0	3.436
	14860.0	3.61
	17420.0	3.782
	20420.0	3.953
	23940.0	4.122
	28060.0	4.286
	32890.0	4.445
	38550.0	4.598
	45190.0	4.743
	52970.0	4.878
	62090.0	5.003
	72780.0	5.115
	85310.0	5.213

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2601
q = 13.92
mu = 2.001
epsilonL = 1.548e-06
Eth = 41.64

Fit range

E = 41.64 – 100000