{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "V", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Xe+ on V(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2601, "q": 13.92, "mu": 2.001, "epsilonL": 1.548e-06, "Eth": 41.64}, "E_min": 41.64, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
41.64	0.0	
48.81	7.355e-05	
57.22	0.0004063	
67.07	0.001265	
78.61	0.003115	
92.15	0.006735	
108.0	0.01337	
126.6	0.02491	
148.4	0.04398	
174.0	0.07386	
203.9	0.1179	
239.0	0.1787	
280.2	0.2566	
328.4	0.3493	
384.9	0.4526	
451.2	0.5615	
528.9	0.6725	
619.9	0.7832	
726.7	0.8934	
851.8	1.003	
998.4	1.114	
1170.0	1.227	
1372.0	1.342	
1608.0	1.462	
1885.0	1.586	
2209.0	1.714	
2590.0	1.848	
3036.0	1.987	
3558.0	2.131	
4171.0	2.281	
4889.0	2.435	
5731.0	2.594	
6717.0	2.757	
7874.0	2.923	
9229.0	3.092	
10820.0	3.264	
12680.0	3.436	
14860.0	3.61	
17420.0	3.782	
20420.0	3.953	
23940.0	4.122	
28060.0	4.286	
32890.0	4.445	
38550.0	4.598	
45190.0	4.743	
52970.0	4.878	
62090.0	5.003	
72780.0	5.115	
85310.0	5.213	
-----