pwiDB

Plasma-Surface Interaction Data Set 240

Sputtering of Kr⁺ on V(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on V(pc) at 300 K

angle = 0.0 deg	E /eV	P
	34.62	0.0
	40.73	5.072e-05
	47.93	0.0003305
	56.39	0.001146
	66.35	0.003069
	78.06	0.007119
	91.85	0.01501
	108.1	0.02943
	127.2	0.05407
	149.6	0.09322
	176.0	0.1504
	207.1	0.2262
	243.7	0.3174
	286.7	0.4178
	337.4	0.5208
	396.9	0.622
	467.0	0.7199
	549.5	0.8145
	646.5	0.9072
	760.7	0.9993
	895.0	1.092
	1053.0	1.187
	1239.0	1.284
	1458.0	1.384
	1715.0	1.487
	2018.0	1.593
	2375.0	1.703
	2794.0	1.815
	3287.0	1.93
	3868.0	2.047
	4551.0	2.166
	5355.0	2.286
	6300.0	2.407
	7413.0	2.528
	8722.0	2.647
	10260.0	2.766
	12070.0	2.881
	14210.0	2.993
	16720.0	3.101
	19670.0	3.204
	23140.0	3.3
	27230.0	3.389
	32030.0	3.469
	37690.0	3.54
	44350.0	3.599
	52180.0	3.647
	61390.0	3.681
	72240.0	3.702
	84990.0	3.707

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.35
q = 9.48
mu = 2.202
epsilonL = 3.409e-06
Eth = 34.62

Fit range

E = 34.62 – 100000