{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "V", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Kr+ on V(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.35, "q": 9.48, "mu": 2.202, "epsilonL": 3.409e-06, "Eth": 34.62}, "E_min": 34.62, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
34.62	0.0	
40.73	5.072e-05	
47.93	0.0003305	
56.39	0.001146	
66.35	0.003069	
78.06	0.007119	
91.85	0.01501	
108.1	0.02943	
127.2	0.05407	
149.6	0.09322	
176.0	0.1504	
207.1	0.2262	
243.7	0.3174	
286.7	0.4178	
337.4	0.5208	
396.9	0.622	
467.0	0.7199	
549.5	0.8145	
646.5	0.9072	
760.7	0.9993	
895.0	1.092	
1053.0	1.187	
1239.0	1.284	
1458.0	1.384	
1715.0	1.487	
2018.0	1.593	
2375.0	1.703	
2794.0	1.815	
3287.0	1.93	
3868.0	2.047	
4551.0	2.166	
5355.0	2.286	
6300.0	2.407	
7413.0	2.528	
8722.0	2.647	
10260.0	2.766	
12070.0	2.881	
14210.0	2.993	
16720.0	3.101	
19670.0	3.204	
23140.0	3.3	
27230.0	3.389	
32030.0	3.469	
37690.0	3.54	
44350.0	3.599	
52180.0	3.647	
61390.0	3.681	
72240.0	3.702	
84990.0	3.707	
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